Glow discharge mass spectrometry, is an analytical technique used for the qualitative and quantitative analysis of chemical elements at concentration all concentration levels down to ppt range. It is a type of mass spectrometry that uses a glow discharge plasma to produce ions. These are extracted and accelerated into a double focused magnetic sector field where the ions are separated by their mass to charge ratio (m/z) which is characteristic of a particular element.

The samples form the cathode in an Argon glow discharge plasma chamber. The ignition of the plasma causes ejection of material (sputtering) from the sample. This material is atomized and ionized in the plasma and then analyzed by means of mass spectrometry.

Since the samples can be directly measured almost no preparation effort is needed. However, only electroconductive samples can be analyzed.