Microlitographie

HBO mercury short arc lamps for the manufacture of microchips, LCDs and PCBs

Mercury short arc lamps (also referred to by their abbreviation HBO) with a power consumption of between 200 W and 25000 W are used primarily as a light source in the manufacture of microchips, Liquid Crystal Displays (LCDs) and Printed Circuit Boards (PCBs). Thanks to intensive research and development carried out in collaboration with our customers, HBO lamps offer convincing quality and performance – enabling many applications for the semiconductor industry.

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IC/wafer litography

HBO lamps for UV exposure litography of integrated circuits:

- Uses the “i-line” of the emission spectrum (365nm) or deep UV emission (254nm)

- Long lifetimes with lowest degradation

IC/OLED litography

HBO lamps for UV exposure litography of flat panel displays and printed circuit boards:

- Brightest emission in the range 350nm – 450nm

- Designed for constant power and/or constant intensity mode

Advanced packaging

HBO lamps for UV exposure of packaging, Mems, LED litography:

- Used for mask aligners, advanced packaging, wafer inspection

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HBO
Discharge lamps

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Tel.: +49 89 / 62 13 – 0

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